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http://bura.brunel.ac.uk/handle/2438/23723| Title: | An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling |
| Authors: | Abu Ebayyeh, AARM Danishvar, S Mousavi, A |
| Keywords: | capsule network;data augmentation;deep learning;defect detection;generative adversarial network (GAN);pattern recognition;semiconductor manufacturing;wafer bin map (WBM) |
| Issue Date: | 10-Dec-2021 |
| Publisher: | IEEE |
| Citation: | Abu Ebayyeh, A.A.R.M., Danishvar, S. and Mousavi, A. (2021) 'An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling,' IEEE Transactions on Semiconductor Manufacturing, 35 (1), pp. 50 - 59 (10). doi: 10.1109/TSM.2021.3134625. |
| URI: | https://bura.brunel.ac.uk/handle/2438/23723 |
| DOI: | https://doi.org/10.1109/TSM.2021.3134625 |
| ISSN: | 0894-6507 |
| Appears in Collections: | Dept of Electronic and Electrical Engineering Research Papers |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| FullText.pdf | 566.02 kB | Adobe PDF | View/Open |
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