Please use this identifier to cite or link to this item: http://bura.brunel.ac.uk/handle/2438/9650
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dc.contributor.authorManivannan, N-
dc.contributor.authorBalachandran, W-
dc.contributor.authorRibton, C-
dc.contributor.authorBeleca, R-
dc.contributor.authorAbbod, M-
dc.contributor.authorCox, M-
dc.contributor.authorAnastasia, P-
dc.date.accessioned2015-01-05T14:48:36Z-
dc.date.available2015-01-05T14:48:36Z-
dc.date.issued2015-
dc.identifier.citationVacuum, 113: 19 - 23, (March 2015)en_US
dc.identifier.issn0042-207X-
dc.identifier.urihttp://www.sciencedirect.com/science/article/pii/S0042207X14003844-
dc.identifier.urihttp://bura.brunel.ac.uk/handle/2438/9650-
dc.description.abstractA Si3N4 membrane with a thin Cr coating is proposed and demonstrated as an electron beam exit window. On average, 85% electron power transmission efficiency was achieved with a 1 μm thick Si3N4 membrane coated with 1 μm thick Cr and the membrane sustained a beam current of up to 3 mA at 60 keV electron energy for the continuous operation of 3 min. However, for an uncoated membrane of same thickness, the average electron power transmission efficiency was 71% and the maximum beam current sustained was 800 μA. It was also shown that a one micron thick Si3N4 square membrane window of 10 mm × 10 mm could withstand a differential pressure of 1.3 bars.en_US
dc.description.sponsorshipThe work carried out at Brunel University was co-funded by the EC Seventh Framework Programme theme FP7-SST-2011-RTD-1 for the DEECON project (grant number 284745).en_US
dc.language.isoenen_US
dc.publisherElsevieren_US
dc.subjectElectron beam windowsen_US
dc.subjectElectron beam processingen_US
dc.subjectThin membraneen_US
dc.subjectMetal coatingen_US
dc.titleChromium coated silicon nitride electron beam exit windowen_US
dc.typeArticleen_US
dc.identifier.doihttp://dx.doi.org/10.1016/j.vacuum.2014.11.024-
dc.relation.isPartOfVacuum-
dc.relation.isPartOfVacuum-
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Appears in Collections:Dept of Electronic and Electrical Engineering Research Papers

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