Aerodynamic behavior of the bridge of a capacitive RF MEMS switch

Abstract

The present paper proposes a coupled 3D multi-physics model and presents the results of its transient simulation, for a RF MEMS capacitive switch of bridge-type. The fluid structure interaction (FSI) simulation sustains time-varying viscous damping and modified time response of the bridge deflection compared to the actuation modulation above closing of the switch. Complex 3D geometries of the bridge were rarely taken into account in viscous damping assessment much less in the simulation of the full flow around the bridge of the switch. The final goal of the paper is to obtain the dependency of an equivalent damping coefficient with respect to time, to be used in subsequent reduced order models for the switch, that include the aerodynamic behaviour of the switch.